Download Electroceramic-Based MEMS: Fabrication-Technology and Applications (Electronic Materials: Science Technology) djvu

The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (al systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics: Part A: Applications and devices with MEMS: Chemical microsensors. Microactuators based on thin films.

The book is focused on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (al systems) in the large sense, including micro-sensors, micro-actuators, and electronic components for high frequency communications. The book covers major topics and is divided into two parts (a) applications and emerging applications, and (b) materials, fabrication technologies, and functioning issues.

Applications, emerging applications, fabrication technology and functioning issues are presented and . The publication of this book follows a Special Issue on MEMS that was published in the Journal of Electroceramics at the beginning of 2004.

Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The ten invited papers of that special issue were adapted by the authors into chapters of the present book and five additional chapters were added.

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Автор: Setter N. Название: MEMS, gy and Applications .

Электронная книга d MEMS: gy and Applications", Nava Setter. Эту книгу можно прочитать в Google Play Книгах на компьютере, а также на устройствах Android и iOS. Выделяйте текст, добавляйте закладки и делайте заметки, скачав книгу d MEMS: gy and Applications" для чтения в офлайн-режиме.

N. Setter d MEMS: gy and Applications (Electronic Materials: Science & Technology)" Springer 2005-03-03 ISBN: 0387233105 414 pages PDF 6,6 MB. The book is focused on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (al systems) in the large sense, including micro-sensors, micro-actuators, and electronic components for high frequency communications.

Applications and Devices. MEMS-Based Thin Film and Resonant Chemical Sensors. oceedings{amicbasedM, title { MEMS : gy and applications}, author {Nava Setter}, year {2005} }. Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films. Thick-Film Piezoelectric and Magnetostrictive Devices. Micromachined Infrared Detectors Based on Pyroelectric Thin Films. Nava Setter. Applications and Devices. The book covers the following topics: Part A: Applications and devices with MEMS

Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. Micromachined ultrasonic transducers. Pyroelectric microsystems. High frequency tunable devices. MEMS for optical functionality. Part B: Materials, fabrication technology, and functionality: Ceramic thick films for MEMS.

MEMS : gy and Applications. Select Format: Hardcover. ISBN13:9780387233109.